主要参数:
项目(Property) | 检验标准(Specification) | 测量方法(Measurement) |
晶体结构(Crystallinity) | 单晶 (Mono-crystalline) | 位错检测仪 (Dislocation Tester) |
导电类型 (Donor type/Dopant) | P型 (P-type) | P/N型测试笔 (P/N Tester) |
氧含量(Oxygen Concentration) | ≤7.5×1017atoms/cm3 | 德国布鲁布TENSOR II(BRUKER TENSOR II) |
碳含量(Carbon Concentration) | ≤5.0×1016atoms/cm3 | 德国布鲁布TENSOR II(BRUKER TENSOR II) |
少子寿命 (Lifetime) | ≥50μS | Sinton BCT-400 |
平均电阻率(AVG Resistivity) | 0.85±0.03Ω·CM | Hennecke六代分选机(HENNECKS SORTER VI |